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1

Fabrication of normally-closed bidirectional micropumps in silicon–polymer technology featuring photopatternable silicone valve lips

Thomas Lemke, Giovanni Biancuzzi, Hagen Feth, Jochen Huber, Frank Goldschmidtböing, Peter Woias

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 1.41 MB

english, 2011

2

A novel artificial sphincter prosthesis driven by a four-membrane silicon micropump

Alexander F. Doll, Martin Wischke, Andreas Geipel, Frank Goldschmidtboeing, Olaf Ruthmann, Ulrich T. Hopt, Hans-Juergen Schrag, Peter Woias

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 1.19 MB

english, 2007

3

A high performance bidirectional micropump for a novel artificial sphincter system

A. Doll, M. Heinrichs, F. Goldschmidtboeing, H.-J. Schrag, U.T. Hopt, P. Woias

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 775 KB

english, 2006

4

An implantable active microport based on a self-priming high-performance two-stage micropump

A. Geipel, F. Goldschmidtböing, A. Doll, P. Jantscheff, N. Esser, U. Massing, P. Woias

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1016 KB

english, 2008

5

Characterization of different beam shapes for piezoelectric energy harvesting

Goldschmidtboeing, Frank, Woias, Peter

Journal:

Journal of Micromechanics and Microengineering

Year:

2008

Language:

english

File:

PDF, 791 KB

english, 2008

6

Stress-Free Bonding Technology with Pyrex for Highly Integrated 3D Fluidic Microsystems

Thoma, Florian, Goldschmidtböing, Frank, Cobry, Keith, Woias, Peter

Journal:

Year:

2014

Language:

english

File:

PDF, 9.39 MB

english, 2014

7

Versatile low temperature wafer bonding and bond strength measurement by a blister test method

Alexander Doll, Martin Rabold, Frank Goldschmidtböing, Peter Woias

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 672 KB

english, 2006

8

Design of an implantable active microport system for patient specific drug release

A. Geipel, F. Goldschmidtboeing, P. Jantscheff, N. Esser, U. Massing, P. Woias

Journal:

Biomedical Microdevices

Year:

2008

Language:

english

File:

PDF, 423 KB

english, 2008

9

A dynamic linearization concept for piezoelectric actuators

Biancuzzi, G., Haller, D., Lemke, T., Wischke, M., Goldschmidtboeing, F., Woias, P.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2011

Language:

english

File:

PDF, 860 KB

english, 2011

10

Magnetic sensor for arterial distension and blood pressure monitoring

Ruhhammer, Johannes, Herbstritt, Tamara, Ruh, Dominic, Foerster, Katharina, Heilmann, Claudia, Beyersdorf, Friedhelm, Goldschmidtboeing, Frank, Seifert, Andreas, Woias, Peter

Journal:

Biomedical Microdevices

Year:

2014

Language:

english

File:

PDF, 3.54 MB

english, 2014

11

[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Implantable multi sensor system for in vivo monitoring of cardiovascular parameters

Bingger, P., Fiala, J., Seifert, A., Weber, N., Moser, A., Goldschmidtboeing, F., Foerster, K., Heilmann, C., Beyersdorf, F., Woias, P., Zappe, H.

Year:

2009

Language:

english

File:

PDF, 732 KB

english, 2009

12

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Low Temperature Wafer Bonding: Plasma Assisted Silicon Direct Bonding vs. Silicon-Gold Eutectic Bonding

Rabold, Martin, Kuster, Holger, Woias, Peter, Goldschmidtboeing, Frank

Year:

2008

Language:

english

File:

PDF, 422 KB

english, 2008

13

A generic analytical model for micro-diaphragm pumps with active valves

Goldschmidtböing, F, Doll, A, Heinrichs, M, Woias, P, Schrag, H-J, Hopt, U T

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 232 KB

english, 2005

14

A New Approach to Determine Ligament Strain Using Polydimethylsiloxane Strain Gauges: Exemplary Measurements of the Anterolateral Ligament

Zens, Martin, Ruhhammer, Johannes, Goldschmidtboeing, Frank, Woias, Peter, Feucht, Matthias J., Mayr, Herrmann O., Niemeyer, Philipp

Journal:

Journal of Biomechanical Engineering

Year:

2014

Language:

english

File:

PDF, 3.20 MB

english, 2014

15

A New Concept of a Drug Delivery System with Improved Precision and Patient Safety Features

Thoma, Florian, Goldschmidtböing, Frank, Woias, Peter

Journal:

Year:

2014

Language:

english

File:

PDF, 1.80 MB

english, 2014

16

Design, Characterization and Sensitivity Analysis of a Piezoelectric Ceramic/Metal Composite Transducer

Mansoor, Muhammad, Köble, Sören, Wong, Tin, Woias, Peter, Goldschmidtböing, Frank

Journal:

Year:

2017

Language:

english

File:

PDF, 5.39 MB

english, 2017

17

Characterization of active silicon microvalves with piezoelectric membrane actuators

A. Doll, M. Wischke, H.-J. Schrag, A. Geipel, F. Goldschmidtboeing, P. Woias

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 351 KB

english, 2007

18

Performance of piezoelectric micropumps actuated by charge recovery

Giovanni Biancuzzi, Thomas Lemke, Peter Woias, Olaf Ruthmann, Hans J. Schrag, Bernhard Vodermayer, Thomas Schmid, Frank Goldschmidtboeing

Journal:

Procedia Chemistry

Year:

2009

Language:

english

File:

PDF, 304 KB

english, 2009

19

German Artificial Sphincter System: First Report of a Novel and Highly Integrated Sphincter Prosthesis for Therapy of Major Fecal Incontinence

Hans-J. Schrag, Federico Fragoza Padilla, Frank Goldschmidtböing, Alexander Doll, Peter Woias, Ulrich T. Hopt

Journal:

Diseases of the Colon & Rectum

Year:

2004

Language:

english

File:

PDF, 123 KB

english, 2004

20

Development of a Novel, Remote-Controlled Artificial Bowel Sphincter Through Microsystems Technology

Hans-J. Schrag, Olaf Ruthmann, Alexander Doll, Frank Goldschmidtböing, Peter Woias, Ulrich T. Hopt

Journal:

Artificial Organs

Year:

2006

Language:

english

File:

PDF, 309 KB

english, 2006

21

MOS-compatible fabrication and characterization of tunnel junctions in BESOI-material

T. Köster, B. Hadam, F. Goldschmidtböing, K. Hofmann, J. Gondermann, J. Stein, S. Hu, S. Altmeyer, B. Spangenberg, H. Kurz

Journal:

Microelectronic Engineering

Year:

1998

Language:

english

File:

PDF, 289 KB

english, 1998

22

Electromagnetic vibration harvester with piezoelectrically tunable resonance frequency

Wischke, M, Masur, M, Goldschmidtboeing, F, Woias, P

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 686 KB

english, 2010

23

Bidirectional frequency tuning of a piezoelectric energy converter based on a cantilever beam

Eichhorn, C, Goldschmidtboeing, F, Woias, P

Journal:

Journal of Micromechanics and Microengineering

Year:

2009

Language:

english

File:

PDF, 559 KB

english, 2009

24

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoelectrically tunable electromagnetic vibration harvester

Wischke, M., Masur, M., Goldschmidtboeing, F., Woias, P.

Year:

2010

Language:

english

File:

PDF, 834 KB

english, 2010

25

[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - A Low Cost Generator Concept for Energy Harvesting Applications

Wischke, M., Goldschmidtboeing, F., Woias, P.

Year:

2007

Language:

english

File:

PDF, 780 KB

english, 2007

26

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Strategies for void-free liquid-filling of micro cavities

Goldschmidtboeing, F., Woias, P.

Year:

2005

Language:

english

File:

PDF, 628 KB

english, 2005

27

[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - A novel self-heating paraffin membrane micro-actuator

Goldschmidtboing, F., Katus, P., Geipel, A., Woias, P.

Year:

2008

Language:

english

File:

PDF, 2.68 MB

english, 2008

28

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Piezoelectric microactuators in polymer-composite technology

Friese, C., Goldschmidtboing, F., Woias, P.

Year:

2003

Language:

english

File:

PDF, 334 KB

english, 2003

29

[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Low temperature plasma-assisted wafer bonding and bond-interface stress characterization

Doll, A., Goldschmidtboeing, F., Woias, P.

Year:

2004

Language:

english

File:

PDF, 305 KB

english, 2004

30

[IEEE 2014 IEEE International Symposium on Medical Measurements and Applications (MeMeA) - Lisboa, Portugal (2014.6.11-2014.6.12)] 2014 IEEE International Symposium on Medical Measurements and Applications (MeMeA) - Novel measurement technique for knee joint laxities using polymeric capacitive strain gauges

Zens, M., Ruhhammer, J., Goldschmidtboeing, F., Woias, P., Mayr, H. O., Niemeyer, P., Bernstein, A.

Year:

2014

Language:

english

File:

PDF, 1.77 MB

english, 2014

31

Analytical model for nonlinear piezoelectric energy harvesting devices

Neiss, S, Goldschmidtboeing, F, M Kroener,, Woias, P

Journal:

Smart Materials and Structures

Year:

2014

Language:

english

File:

PDF, 1.10 MB

english, 2014

32

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Design and characterization of a low-voltage piezoelectrically actuated polymer membrane

Feth, H., Esch, M., Mueller, C., Thoma, F., Biancuzzi, G., Lemke, T., Goldschmidtboeing, F., Woias, P.

Year:

2011

Language:

english

File:

PDF, 1.20 MB

english, 2011

33

[IEEE 2012 34th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) - San Diego, CA (2012.8.28-2012.9.1)] 2012 Annual International Conference of the IEEE Engineering in Medicine and Biology Society - Arterial strain measurement by implantable capacitive sensor without vessel constriction

Ruhhammer, J., Ruh, D., Foerster, K., Heilmann, C., Beyersdorf, F., Barker, A., Jung, B., Seifert, A., Goldschmidtboeing, F., Woias, P.

Year:

2012

Language:

english

File:

PDF, 566 KB

english, 2012

34

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Cymbal type Piezo-Polymer-Composite actuators for active cancellation of flow instabilities on airfoils

Haller, D., Paetzold, A., Goldin, N., Neiss, S., Goldschmidtboeing, F., Nitsche, W., King, R., Woias, P.

Year:

2011

Language:

english

File:

PDF, 2.19 MB

english, 2011

35

[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - An Implantable Active Microport Based on a Self-Priming High-Performance Two-Stage Micropump

Geipel, A., Goldschmidtboing, F., Doll, A., Nadir, S., Jantscheff, P., Esser, N., Massing, U., Woias, P.

Year:

2007

Language:

english

File:

PDF, 690 KB

english, 2007

36

[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Pressure-Independent Micropump with Piezoelectric Valves for Low Flow Drug Delivery Systems

Geipel, A., Doll, A., Goldschmidtboing, F., Jantscheff, P., Esser, N., Massing, U., Woias, P.

Year:

2006

Language:

english

File:

PDF, 820 KB

english, 2006

37

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Capillary filling of micro-reservoirs with various cross sections

Goldschmidtboing, F., Schlosser, R., Schonhardt, S., Woias, P.

Year:

2003

Language:

english

File:

PDF, 294 KB

english, 2003

38

[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Non-Destructive Strength Characterization of Full-Wafer Bonds Using a Modified Blister Test Method

Rabold, M., Doll, A., Goldschmidtboing, F., Woias, P.

Year:

2006

Language:

english

File:

PDF, 997 KB

english, 2006

39

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Magnetic sensor for monitoring of arterial strain

Ruhhammer, J., Herbstritt, T., Foerster, K., Heilmann, C., Beyersdorf, F., Seifert, A., Goldschmidtboeing, F., Woias, P.

Year:

2013

Language:

english

File:

PDF, 869 KB

english, 2013

40

Surface-Energy Characterization of Full-Wafer Bonds Using the Concealed Blister Test Method

Rabold, M., Busch, D., Goldschmidtboeing, F., Woias, P.

Journal:

Electrochemical and Solid-State Letters

Year:

2009

Language:

english

File:

PDF, 432 KB

english, 2009

41

Design and simulation of advanced charge recovery piezoactuator drivers

Biancuzzi, G, Lemke, T, Woias, P, Ruthmann, O, Schrag, H J, Vodermayer, B, Schmid, T, Goldschmidtboeing, F

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 567 KB

english, 2010

42

Fabrication of a normally-closed microvalve utilizing lithographically defined silicone micro O-rings

Lemke, T, Kloeker, J, Biancuzzi, G, Huesgen, T, Goldschmidtboeing, F, Woias, P

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 831 KB

english, 2011

43

Highly elastic conductive polymeric MEMS

Ruhhammer, J, Zens, M, Goldschmidtboeing, F, Seifert, A, Woias, P

Journal:

Science and Technology of Advanced Materials

Year:

2015

Language:

english

File:

PDF, 1.08 MB

english, 2015

44

Parameter identification for resonant piezoelectric energy harvesters in the low- and high-coupling regimes

Goldschmidtboeing, Frank, Wischke, Martin, Eichhorn, Christoph, Woias, Peter

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 175 KB

english, 2011

45

Analysis of a bimetallic micro heat engine for energy harvesting

Ravindran, S K T, Kroener, M, Shabanian, A, Goldschmidtboeing, F, Woias, P

Journal:

Smart Materials and Structures

Year:

2014

Language:

english

File:

PDF, 3.77 MB

english, 2014

46

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Finite-Elements Simulation for True 3D Structure Generation of Anisotropic Electrochemical Wet-Etching Processes

Kroener, Michael, Ivanov, Alexey, Goldschmidtböing, Frank, Mescheder, Ulrich, Woias, Peter

Year:

2009

Language:

english

File:

PDF, 512 KB

english, 2009

47

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Non-Destructive Strength Characterization of Full-Wafer Bonds: A Modified Blister Test Method Enables a Controlled Crack Formation at the Bond Interface

Rabold, Martin, Doll, Alexander, Goldschmidtboeing, Frank, Woias, Peter

Year:

2006

Language:

english

File:

PDF, 1.85 MB

english, 2006

48

The Modified Blister Test Method

Rabold, Martin, Doll, Alexander, Goldschmidtboeing, Frank, Woias, Peter

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 812 KB

english, 2007

49

Thermoelectric Characterization of Electrochemically Deposited Bi2Te3 Films Accounting for the Presence of Conductive Seed Layers

Rostek, R., Kottmeier, J., Kratschmer, M., Blackburn, G., Goldschmidtboing, F., Kroner, M., Woias, P.

Journal:

Journal of The Electrochemical Society

Year:

2013

Language:

english

File:

PDF, 1.87 MB

english, 2013

50

German Artificial Sphincter System-GASS

Schrag, Hans-J, Padilla, Federico F, Doll, A, Goldschmidtböing, Frank, Woias, Peter, Hopt, Ulrich T

Journal:

Biomedical Engineering/ Biomedizinische Technik

Year:

2004

File:

PDF, 520 KB

2004